Application of perfluoroether rubber in the semiconductor field
Application of perfluoroether rubber in the semiconductor field
Perfluoroether rubber (FFKM) is a high-performance sealing material, and its excellent performance deepens its application into the entire manufacturing system of semiconductor products. Perfluoroether sealing rings are one of the main consumables required for the production of integrated circuits. （ https://www.ab-sm.com/ ）
1、 Performance characteristics of perfluoroether rubber
Perfluoroether rubber mainly consists of tetrafluoroethylene and perfluoroalkyl vinyl ether as the main monomers, which are copolymerized with a small amount of third monomers with vulcanization points. As shown in the figure below, all hydrogen atoms on carbon atoms in the polymer are replaced by fluorine atoms, making it a rubber without C-H bonds at all.
The fluorine content in the molecular structure of perfluoroether rubber, the structure and content of perfluorinated vinyl ether, and the bond energy and quantity of cross-linking bonds during vulcanization determine the properties and glass transition temperature of vulcanized rubber. Therefore, the performance of perfluoroether rubber from different brands also varies due to the differences in the molecular structure and composition of their monomers.
The main performance characteristics of perfluoroether rubber:
1) Physical performance
Perfluoroether rubber with a density of 1.9-2.0g/cm ³， The physical and mechanical properties are similar to those of fluororubber, and the high-temperature compression permanent deformation resistance is better than that of fluororubber.
2) Chemical resistance
The macromolecules do not exhibit strong inertness when connected, and the radius of the F atom is much larger than that of the H atom before substitution. The macromolecular chains are arranged in a spiral shape, and the C-C bond is basically surrounded by the shell composed of the F atom, giving the polymer significant chemical resistance.
Note:
A represents swelling below 10% (including non swelling), and the medium has no significant impact on rubber properties;
B represents a volume swelling rate of 10-20%, and the performance of the material is affected to a certain extent, but it is basically usable, but the product life may be shortened;
C indicates that the material has poor resistance to the medium and needs to be analyzed based on the actual situation to determine if it is usable;
D indicates that the material cannot be used in the medium environment.
Similar to polytetrafluoroethylene, perfluoroether rubber is not affected by any medium except for certain high fluorocarbon solvents, and can withstand corrosion from over 1600 chemical solvents such as strong acids, strong alkalis, organic solvents, ultra-high temperature vapors, ethers, ketones, esters, nitrogen-containing compounds, hydrogen carbides, alcohols, aldehydes, furans, amine compounds, etc.
3) High and low temperature resistance
The usage temperature of perfluoroether rubber is generally 260~290 ℃, and it can be intermittently used at high temperatures of 316 ℃. Due to the introduction of a small amount of – OF3 links on the molecular branch chains, the irregular arrangement of the branch chains improves the flexibility of the molecules and enhances the low temperature resistance of the rubber. Some brands of perfluoroether rubber have a Tg of -19 ℃.
4) High temperature steam resistance
5) Low release and precipitation properties
6) Plasma resistance
For products that exhibit high cleanliness and low precipitation in a plasma environment, they can withstand plasma impact for a long time.
Perfluoroether rubber in 1